JPH0215867U - - Google Patents
Info
- Publication number
- JPH0215867U JPH0215867U JP9219388U JP9219388U JPH0215867U JP H0215867 U JPH0215867 U JP H0215867U JP 9219388 U JP9219388 U JP 9219388U JP 9219388 U JP9219388 U JP 9219388U JP H0215867 U JPH0215867 U JP H0215867U
- Authority
- JP
- Japan
- Prior art keywords
- circular substrate
- polishing machine
- center
- axis
- polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9219388U JPH0215867U (en]) | 1988-07-12 | 1988-07-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9219388U JPH0215867U (en]) | 1988-07-12 | 1988-07-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0215867U true JPH0215867U (en]) | 1990-01-31 |
Family
ID=31316647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9219388U Pending JPH0215867U (en]) | 1988-07-12 | 1988-07-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0215867U (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0192064A (ja) * | 1987-09-30 | 1989-04-11 | Toshiba Mach Co Ltd | 片面研磨装置 |
-
1988
- 1988-07-12 JP JP9219388U patent/JPH0215867U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0192064A (ja) * | 1987-09-30 | 1989-04-11 | Toshiba Mach Co Ltd | 片面研磨装置 |